Safematic high vacuum sputter coater

The Safematic CCU-010 HV sets new standards for high vacuum, bench top sputter coating. Designed for SEM sputter coating applications using oxidising and non-oxidising metals.

The CCU-010 HV has a class-leading vacuum performance and has unique, self-contained, plug-in-style sputtering modules which deliver high quality sputtering films, combined with ease of use and servicing. Two sputtering modules are available – the SP-010 is ideal for most SEM applications, whilst the SP-011 has a magnetron design optimised for fast sputtering.

Downloads

Safematic-CCU-010-brochure

Go to ordering information

Fully automatic sputtering coating for SEM, FE-SEM and thin film application
Interchangeable, self-contained, plug-in style coating modules
Integral, oil-free, high vacuum turbomolecular pumping
High quality sputtering of oxidising and non-oxidising metals
Active cooling of sputtering head module – ensures low temperature operation
Dual-location quartz crystal film thickness measurement – fitted as standard
Intuitive, touch-screen control – rapid data input, simple operation
Superb build quality and reliability
Small footprint (no external rotary pump and pump hose needed)
100mm diameter chamber with simple upgrade to large chamber (150mm/6″ specimens)
Superb Swiss quality and reliability

Sputter coating modules for high resolution SEM and thin film coating

Compact sputter coating modules (SP-010 and SP-011) house all the features required for the highest quality sputter coating – including magnetron, sputering target, shutter, process pressure regulator, power electronics and cooling system. The high vacuum capabilities of the CCU-010 HV make it ideal for applications using both oxidising (e.g. Cr, Ir, W, ITO etc.) and non-oxidising (e.g. Au, Au/Pd, Pt etc.) metals. For some thin film applications where extended sputtering times are required the SP-010 sputtering module has built-in cooling, which allows continuous coating runs of up to 50 minutes without the inconvenience of time consuming “rest periods” required by older style coaters. For special processes requiring thicker films the optional high sputtering module (SP-011) is recommended.

FTM film thickness monitor

A dual-position film thickness monitor (FTM) measurement system monitors and terminates the sputter coating and carbon evaporation processes at user-defined thickness.

The plug-in monitoring quartz crystal and holder can be moved between the centre of the specimen stage and the outside, to accommodate different specimen sizes and layouts.

Oil free, high vacuum pumping

CCU-010 HV has a fully integrated Pfeiffer Hi Pace 80 turbomolecular pump backed by a compact Vacuubrand MD1 Vario-SP membrane pump. With both contained in the main console, this oil-free pumping system delivers class-leading vacuum performance (to 2 x 10^-6mbar) all in a compact instrument with a footprint of only 35 x 55cm.

To configure a working CCU-010 HV high vacuum carbon coater you will require the following:

CCU-010 HV base unit inclusive of a standard specimen stage
SP-010 sputter coating module and/or CT-010 carbon evaporation module
Optional alternative specimen stage such as RS-010 or PS-006
Other optional accessories as required
For SP-010 sputtering head module selected preferred sputtering targets

Please add your required items using the quote buttons below and we will endeavour to provide your quotation as quickly as possible

Rotation and rotary planetary stages

A choice of easily exchangeable specimen stages, all with height and tilt angle adjustments, is available for the CCU-010 HV.

CCU-010 HV includes a standard plug-in style 80mm diameter specimen stage.
For specimens requiring rotation the optional RS-010 rotation stage is available.
For specimens with very irregular surfaces, or for particulates and spheres, the PS-006 rotary planetary stage is recommended.

3. Rotary Planetary Stage

1. Standard Stage

2. Rotary Stage

RS-010 rotary specimen stage

Dimensions (D x H): 80 x 23mm
Weight: 0.2kg
Number of specimen stub holders: 20
Rotation direction:: Clockwise
Speed: 6-120 rpm

PS-010 rotary planetary specimen stage

Dimensions (D x H): 80 x 23mm
Weight: 0.2kg
Number of sample stub holders: 6
Rotation direction of table: Clockwise
Speed (specimen table): 0-20rpm
Rotation direction (specimen stub holders): Anticlockwise
Speed (specimen stub holders): 0-65rpm

Head Storage Unit

HS-010 vacuum storage system

The HS-010 is a compact vacuum storage system that allows a second CCU-010 coating head, additional stage and sputter coater targets to be stored under vacuum when not in use. There is no requirement for a separate pump as the CCU-010 can be used to pump down the storage unit.

For further information please see: Flyer HS-010 head storage unit

GD-010 Glow discharge unit

The GD-010 is a plug-in glow discharge unit specifically designed for use with the CT-010 carbon thread evaporation head module.

It consists of:

Height adjustable glow ring with shielding
High voltage power supply
High voltage plug-in connector
Process gas plug-in connector
Process pressure regulation valve
Process gas connection through CT-010 carbon thread evaporation head module

ET-010 plasma cleaning stage

The ET-010 plasma cleaning specimen stage is designed for the pre-treatment (or post-treatment) of specimens in combination with a coating process. Specimens can be pre-cleaned to remove light hydrocarbon surface contamination prior to sputter coating or carbon coating without the need to break vacuum. The ET-010 can also be used for the hydrophobic to hydrophilic surface conversion of TEM carbon films using an air plasma.

Click here for detailed information: Flyer ET-010 etching unit

Coating Lab software provides easy access to comprehensive coating and process data for audit or quality control processes.

The Windows-based software records key data as real-time curves in a graphical format: vacuum pressure, current, voltage, carbon coating and sputter coating rate, coating thickness and specimen temperature.

The CCU-010 is connected to a PC using a USB cable, with Coating LAB automatically establishing a connection to the coater. Password protected tools for configuring the system and updating the firmware are included.

System requirements HW

Processor: 1GHz
RAM: 512MB
Memory 32 Bit: 850MB
Memory 64 Bit: 2GB

System requirements SW

Client operating system: Windows 8.1, Windows 8, Windows 7 SP1, Windows Vista SP2
Server operating system: Windows Server 2012 R2, Windows Server 2012 (64-Bit-Edition), Windows Server 2008 R2 SP1, Windows Server 2008 SP2

RC-010 is Windows-based software that allows the CCU-010 HV to be remotely controlled and monitored from an external computer, for example when using the coater inside a glovebox. The GUI allows easy set up and selection of sputtering and carbon coating recipes and comes ready with user editable recipes with optimal settings for the most common metal sputtering targets and carbon evaporation. Connection from a laptop or computer to the CCU-010 HV coating system is via a USB cable.

Minimum system requirements:
Windows 10, Windows 8.1, Windows 8, Windows 7 SP1, minimum 512MB of RAM, screen resolution 1024×768 or higher, USB 2.0 Interface

Brochure download:RC-010_remote control software.

Dimensions

Dimensions (unpacked): L 570 x W 360 x H 350mm. 25kg

Glass cylinder: Ø120mm (DN 100 ISO-KF compatible)

Specifications

Implosion guard: Plastic splinter shield around the glass cylinder

Sputtering targets: Ø54mm and thickness up to 3mm

Coating time: 0.5 to 990s

Coating current: 20mA (10-100mA for optional SP-010 sputtering head module)

Pumping: Integrated, oil-free turbomolecular and membrane pumps

Ultimate vacuum: <2 x 10^-6 mbar

Vacuum measurement: Pirani and cold cathode gauges

Display: 115 x 86mm, TFT graphical display

Specimen stage: Ø 80mm, height adjustment 0-50mm, tilt 0-45°

Film thickness measurement: Dual-position film thickness monitoring system. Piezoelectric crystal: frequency 6MHz, Ø 14mm, thickness 0.4mm.

Electrical: Plug C14, 90-260VAC, 47-63 Hz, 500W

Process gas connections: Process gas: Ø 6mm, venting gas: Ø 6mm, plasma gas: Ø 6mm

Electrical: Connector socket C13, secured with 10A therm. circuit breaker

Located in Switzerland’s St. Gallen Rhine Valley – a region long renowned for expertise in vacuum and coating technology – Safematic GmbH manufactures technology-leading, highly innovative vacuum coating systems for electron microscopy and thin film applications. Labtech is delighted to offer Safematic sputter coaters, carbon coaters and accessories to our customers in the UK and Ireland.

Back to the top

Ordering information:

Sputter coater base unit and coating modules

To configure a working CCU-010 HV system please add the base unit and carbon head module to your quote and then add any other accessories from the list of options below:

Large sputter coater chamber option – for samples up to 6″ (152mm) in diameter

The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated.

A sample holder for 6” wafers is included, other holders can be fitted. The LC-006 can be retrofitted to existing CCU-010 coaters.

LC-006 large chamber for CCU-0010 coaters
The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated. The chamber is made of aluminium therefore does not require an implosion guard. The LC-006 includes a sample holder for 6” wafers, but other holders can be fitted.

SKU: 1000226
Price On Request £0.00 Add to basket

Add to quote

Sputter coater specimen stages

The CCU-10 comes as standard with a static specimen stage that can be pre-tilted and height adjusted

Glow discharge and plasma cleaning

Safematic offer a choice of glow discharge / etching options for the CCU-010 HV carbon coating unit (not available with SP-010 sputtering module)

Remote control software and Coating LAB

Safematic offer software options for retrieval of sputter coating and carbon coating data for audit purposes or for remote control of the instrument

Sputter coater/carbon coater module storage

A compact vacuum storage system for CCU-010 head modules and other accessories. Can be pumped by the coater or separate rotary pump (not supplied). Also useful for storing oxidising sputtering targets, such as Cr, Al and W