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Silicon wafers with 100nm of silver coating

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Sputter coater targets

EM-Tec sputter coater targets are available in a wide range of metals with sizes to fit most makes and models of sputter coater.

We offer metal targets with high purity of 99.99% or very close to, to avoid artefacts during SEM imaging and especially with EDX analysis. Therefore, some sputtering targets can be relatively expensive due to the  high purity of the precious metals used.

PLEASE NOTE: Whilst we offer very competitive pricing on all sputter coater targets our prices will vary from time to time due to fluctuations of the market prices of metals. For this reason we do not display prices online but kindly ask that you contact us for a quotation.

To help you choose the right target for your sputter coater the table below lists the targets by size to fit your coater.  The popular sizes of 54mm and 57mm are listed first.

We have also listed the targets by metal. Metal selection guide

Sputter target selection

By coater make and model – click on link to go to targets

Brand Model  
Diameter (Ø) mm
82 ID 62 60 58 57 54 50 38 28 24 19
Agar Scientific/Cressington 108 manual, 108auto, 108auto, SE 208HR sputter coater. Available targets X
Agar Scientific/Cressington 28mm Ø for Cressington/Agar 208 HRD sputter coaters. Available targets X
Bal-Tec SCD 005, 040, 050, 500, MED 010, MED 020 sputter coaters. Available targets. X
Bio-Rad / Emscope SC500 and SC500A. Target metal mounted on 58mm diameter backing plate. Available targets. X
Bio-Rad SC5200 automatic sputter coater, SC502 mini sputter coater. Available targets. X
Cressington 108 manual, 108auto, 108auto, SE 208HR sputter coater. Available targets X
Cressington 308HR and 328UHR. Available targets. X
Denton Desk II, III, IV, V sputter coaters. Available targets. X
Edwards 150B and Scancoat sputter coaters. Available targets. X
Emitech SC7620, SC7610, K575X, Q150 sputter coaters. Available targets. X
K500X, K550X, K650X. Mounted on backing holders. Available targets. X
K575XD, K675X, K675XD turbo pumped sputter coaters. Available targets. X
EMS 150R, 300R, SC7620 sputter coaters. Available targets. X
Gatan 681, 682 PECS, 685 PECS II ion beam coaters. Available targets. X
Gatan/Hexland/Oxford  ALTO2500, ALTO2100 and CT1500 cryo-SEM systems. Available targets X
Hitachi Hitachi MC 1000 sputter coater. Available targets. X
HHV Ltd BT150, BT300 sputter coaters. Available targets. X
JEOL Smart Coater, JFC-1200, 1300, 1400, 1600, JFC-2300HR coaters. Available targets. X
Leica ACE 200, & 600, EM SCD 005, 050, 500 EM,MED 020 coaters. Available targets. X
Polaron, Bio-Rad, Fisons, VG, Thermo

PS3, E5000, E5200, E5400, 5800, SC7610, SC502, SC7620 rotary pumped sputter coaters.

Available targets

 X

E5100, E5150, SC510, SC515, SC7640, SC7680

82mm OD, 60mm ID annular

Available annular targets

 X
Quorum Technologies Q150R, Q150T, SC7620, Q300R, Q300T sputter coaters. Available targets. X
Quorum, Bio-rad, VG, Thermo E7400, LT7400, PP2000, PP3000, PP3010T cryo-SEM systems. Available targets. X
Safematic CCU-010 HV, CCU-010 LV sputter coaters. Available targets. X
SPI Supplies SPI Modular sputter coater. Available targets. X
SPI Super sputter coater. Available targets X

 

Ordering information:

EM-TEC sputter coater targets 57mm diameter

Disc targets without a backing plate. Including for the following coaters:

  • Quorum Q series and SC7620
  • Agar/Cressington 108 and 208
  • Emitech and EMS K575XD, K675X, K675XD 
  • Older coaters using disc targets from Polaron, Bio-Rad, Fisons,  Thermo VG
  • SPI Supplies modular coater
  • EMS 150R, 300R, SC7620

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EM-TEC sputter coater targets: 54mm diameter

Disc targets without a backing plate. Including for the following sputter coaters:

  • Safematic CCU-010 HV and CCU-010 LV
  • Bal-Tec/ Leica SCD 005, 040, 050, 500, MED 010, MED 020
  • Leica ACE 600 and ACE 200
  • HHV Ltd BT150and BT300

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EM-TEC sputter targets: 60mm diameter

Disc targets without a backing plate. Including for the following sputter coaters:

  • Denton Desk II, III, IV, V 
  • Edwards 150B and Scancoat

EM-TEC sputter targets: 58mm diameter, mounted on a backing plate

For Emsope/Bio-Rad SC500 and SC500A sputter coaters. Target metal mounted on 58mm diameter backing plate.

EM-TEC sputter targets: 60mm diameter mounted on a backing plate

For Emitech and early Quorum K500X, K550X, K650X sputter coaters

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EM-TEC sputter targets: 62mm diameter

Disc targets without a backing plate for the Hitachi MC 1000 sputter coater

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EM-TEC sputter targets: 50mm diameter

Disc targets without a backing plate. Including for the following sputter coaters:

  • JEOL Smart Coater, JFC-1200, 1300, 1400, 1600, JFC-2300HR
  • SPI Supplies Super sputter coater

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EM-TEC sputter targets: 38mm diameter

Disc targets without a backing plate for Cressington 308HR and 328UHR sputter coaters

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EM-TEC sputter targets: 28mm diameter

28mm Ø high purity disc targets without a backing plate for Cressington/Agar 208 HRD sputter coaters

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EM-TEC sputter targets: 24mm diameter

Disc targets without a backing plate for the following cryo-SEM systems:

  • Gatan/Oxford/Hexland ALTO2500, ALTO2100 and CT1500
  • Quorum Technologies, Bio-rad, Fison VG, Thermo E7400, LT7400, PP2000, PP3000, PP3010T

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EM-TEC sputter targets: 19mm diameter

Disc targets without a backing plate for Gatan 681, 682 PECS, 685 PECS II ion beam coaters

EM-TEC sputter targets: 82mm OD 60mm ID mounted on a threaded aluminium ring

For Quorum/Bio-rad/Fison/VG/Thermo sputter coaters: E5100, E5150, SC510, SC515, SC7640, SC7680

Note: All models are low vacuum coaters and designed for non-oxidising (noble) metals only.

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