MCS series magnification standards

EM-Tec MCS series magnification calibration standards from Micro to Nano are unique, cost effective, wide ranging SEM calibration standards. They can be used for magnification calibration or critical dimension measurements in table top SEM, standard SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems.

Two types of calibration ranges for the EM-Tec MCS calibration standards are available, both standard with certificates of traceability or optionally with an individual certificate of calibration:

• EM-Tec MCS-1 with a scale ranging from 2.5mm to 1µm –  ideal for table top and compact SEMs and cover 10x to 20,000x magnifications. Available as a traceable or fully certified version.
• EM-Tec MCS-0.1 with a scale ranging from 2.5mm down to 100nm – ideal for SEM, FESEM and FIB systems and cover 10x to 200,000 magnifications. Available as a traceable or fully certified version.

The  Micro to NanoEM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5 x 10µm) and 0.5µm (500nm).

EM-Tec MCS series are made using state-of-the-art MEMS manufacturing techniques with high contrast chromium deposited lines for the larger features and gold-over-chromium for smaller features below 2.5µm The gold layer ensures an optimum signal-to-noise ratio for calibration purposes.

Advantages of the EM-Tec MCS series are:

• Unprecedented precision over the full calibration range
• All features in one single ultra flat plane
• Metal on silicon with excellent signal to noise ratio
• Wider range of features to accurately calibrate low, medium and high magnification ranges
• Compatible with both SE and BSE imaging
• Fully conductive materials
• Easy to convert feature sizes
• Can be cleaned with plasma cleaning
• All NIST traceable or optionally certified