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Silicon wafers with 100nm of silver coating

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Safematic standard vacuum sputter coater

The Safematic CCU-010 LV is a standard vacuum (rotary pumped) coater primarily designed for SEM sputtering and thin film applications using non-oxidising metals, such as gold and platinum.

The self-contained SP-010 sputter coating head module is designed for ease of use and optimum servicing. The glass vacuum chamber is 120mm in diameter and includes a useful vertical graduated scale to help set the height of the specimen stage. An implosion guard is fitted with a safety cut out to ensure safe operation.

CCU-010 LV includes a dual-position film thickness monitor (FTM) for coating thickness measurement and automatic termination of the sputter coating process.

CCU-010 LV can be fitted with a choice of specimen stages to suit most applications including standard stage, rotary stage, rotary planetary or plasma stage.  There is also an extensive range of accessories – including sputtering targets and CT-010 head module for carbon evaporation. An upgrade to high vacuum is also available if required at a later stage.

Please note:  for FE-SEM applications the high vacuum CCU-010 HV sputter coater is recommended.

Safematic CCU-010 brochure

  • Fully automated sputter coating for SEM
  • Self-contained, plug-in style coating modules
  • Dual-location quartz crystal film thickness monitor as standard
  • Stage options for most specimen types
  • Easy-change sputtering target holder
  • Intuitive, touch-screen control
  • Simple upgrade to add carbon coating
  • Future-proof upgrade to high vacuum coating
  • 100mm diameter chamber with simple upgrade to large chamber (150mm/6″ specimens)
  • Superb Swiss quality and reliability

SP-010 sputter coating module

Compact sputter coating modules (SP-010 and SP-011) house all the features required for the highest quality sputter coating – including magnetron, sputtering target (see options), shutter, process pressure regulator, power electronics and cooling system. The CCU-010 LV plus SP-010 sputter coating module is designed for applications using non-oxidising metals (e.g. Au, Au/Pd, Pt etc.). For some thin film sputtering applications where extended sputtering times are required, the SP-010 sputtering module has built-in cooling, which allows continuous coating runs of up to 50 minutes without the inconvenience of time consuming “rest periods” required by some older style coaters. For special processes requiring thicker films the optional high sputtering rate module (SP-011) is recommended.

SP-011 sputtering module for high sputtering rates

FTM film thickness monitor

A dual-position film thickness monitor (FTM) measurement system monitors and terminates sputter coating and carbon evaporation processes at user-defined thickness.

The plug-in monitoring quartz crystal and holder can be moved between the centre of the specimen stage and the outside, to accommodate different specimen sizes and layouts.

Pumping options

CCU-010 LV requires a suitable rotary vacuum pump.  An Edwards RV3 is recommended – please see Ordering Information for details.

If using an existing pump it needs to have a pumping capacity of 50L/min. or greater.

Edwards RV3 rotary vacuum pump (including Ultragrade oil) with 2m UK mains lead

To configure a working CCU-010 LV standard vacuum carbon coater you will require the following:

  1. CCU-010 LV base unit inclusive of a standard specimen stage
  2. SP-010 sputter coater head module
  3. Optional alternative specimen stages, such as RS-010 or PS-006
  4. Other optional accessories as required
  5. Select rotary vacuum pump and fittings
  6. Select require sputter coating targets as required

Please add your required items using the quote buttons below and we will endeavour to provide your quotation as quickly as possible

Rotation and rotary planetary stages

A choice of easily exchangeable specimen stages, all with height and tilt angle adjustments, is available for the CCU-010 LV.

  1. CCU-010 LV includes a standard plug-in style 80mm diameter specimen stage.
  2. For specimens requiring rotation the optional RS-010 rotation stage is available.
  3. For specimens with very irregular surfaces, or for particulates and spheres, the PS-006 rotary planetary stage is recommended.

Rotary Planetary Stage

3. Rotary planetary stage

Standard Stage

1. Standard stage

Rotary Stage

2. Rotary stage

 

RS-010 rotary specimen stage
Dimensions (D x H):                          80 x 23mm
Weight:                                                 0.2kg
Number of specimen stub holders:  20
Rotation direction::                            Clockwise
Speed:                                                    6-120rpm
PS-010 rotary planetary stage
Dimensions (D x H):                                             80 x 23mm
Weight:                                                                    0.2kg
Number of sample stub holders:                        6
Rotation direction of table:                                 Clockwise
Speed (specimen table):                                       0-20rpm
Rotation direction (specimen stub holders):   Anticlockwise
Speed (specimen stub holders):                         0-65rpm

Head Storage Unit

HS-010 vacuum storage system

The HS-010 is a compact vacuum storage system that allows a second CCU-010 coating module, additional stage and sputter coater targets to be stored under vacuum when not in use. There is no requirement for a separate pump as the CCU-010 can be used to pump down the storage unit.

For further information please see: Flyer HS-010 head storage unit

 

Coating Lab software provides easy access to comprehensive coating and process data for audit or quality control processes.

The Windows-based software records key data as real-time curves in a graphical format: vacuum pressure, current, voltage, carbon coating and sputter coating rate, coating thickness and specimen temperature.

The CCU-010 is connected to a PC using a USB cable, with Coating LAB automatically establishing a connection to the coater. Password protected tools for configuring the system and updating the firmware are included.

System requirements HW
Processor:                                 1GHz
RAM:                                          512MB
Memory 32 Bit:                        850MB
Memory 64 Bit:                        2GB

System requirements SW

Client operating system:            Windows 8.1, Windows 8, Windows 7 SP1, Windows Vista SP2
Server operating system:           Windows Server 2012 R2, Windows Server 2012 (64-Bit-Edition), Windows Server 2008 R2 SP1, Windows Server 2008 SP2

RC-010 is Windows-based software that allows the CCU-010 to be remotely controlled and monitored from an external computer, for example when using the coater inside a glovebox. The GUI allows easy set up and selection of sputtering and carbon coating recipes and comes ready with user editable recipes with optimal settings for the most common metal sputtering targets and carbon evaporation. Connection from a laptop or computer to the CCU-010 HV coating system is via a USB cable.

Minimum system requirements:
Windows 10, Windows 8.1, Windows 8, Windows 7 SP1, minimum 512MB of RAM, screen resolution 1024×768 or higher, USB 2.0 Interface

Brochure download:RC-010_remote control software.

Dimensions

Dimensions (unpacked): L 570 x W 360 x H 350mm. 25kg

Glass cylinder: Ø 120mm (DN 100 ISO-KF compatible)

Implosion guard: Plastic splinter shield around the glass cylinder

Targets:  Ø 54mm and thickness up to 3mm

Coating time: 0.5 to 990s

Coating current: 10-100mA

Ultimate vacuum: <10-3 mbar (depending on the rotary pump)

Vacuum measurement: Pirani guage

Display: 115 x 86mm, TFT graphical display

Specimen stage: Ø 80mm, height adjustment 0-50mm, tilt 0-45°

Film thickness measurement: Dual-position film thickness monitoring system. Piezoelectric crystal: frequency 6MHz, Ø 14mm, thickness 0.4mm.

Electrical: Plug C14, 90-260VAC, 47-63 Hz, 500W

Process gas connections: Process gas: Ø 6mm, venting gas: Ø 6mm, plasma gas: Ø 6mm

Electrical: Connector socket C13, secured with 10A therm. circuit breaker

Ordering information:

CCU-010 LV base unit and sputter coating modules

CCU-010 LV pumping

Large chamber option – for samples up to 6″ (152mm) in diameter 

The LC-006 is a large chamber option that replaces the standard glass chamber and allows specimens up to 6” (152mm) to be coated.

A sample holder for 6” wafers is included, other holders can be fitted. The LC-006 can be retrofitted to existing CCU-010 coaters.

Specimen stages

Please select additional specimen stages from the options below

Remote control software and Coating LAB

Safematic offer software options for retrieval of coating data for audit purposes or for remote control of the instrument

Sputter coater head module storage

For combined coating systems with more than one coating head module a storage unit can be used to store the one not in use under vacuum.

Sputtering targets

Please note that the standard vacuum CCU-010 LV  will sputter non-oxidising (noble) metals, including Au, Au/Pd, Pd, Pt, Pt/Pd, Cu, Ag and Fe. For sputtering oxidising metals, such as Cr, Ir, Al, ITO and W the high vacuum CCU-010 HV is required.